RF-120系列高频电源

• RF-120系列高频电源

• 是溅射、刻蚀、CVD、离子镀等薄膜制备/加工使用的、用于生成等离子体的13.56MHz高频电源（RF电源）。

特性：

A high-frequency power supply (RF power supply) creating 13.56 MHz plasma for thin-film processing and etching, including sputtering, etching, CVD, and ion plating.

The RF-120 series includes DeviceNet, RS232C, and analog interfaces as standard. These are multi-functional powers supplies that offer performance like pattern operation, arcing cut/count functions, and recall of past data. There is also a matching network to facilitate the combination of each power supply and connected device.

功能：

• Pattern operation
  Automatic output control based on output and time data preset in the RF power supply
  Up to 3 patterns with a maximum of 5 points per pattern can be set

• Arcing cut

• Arcing count
  Counts the number of times that arcing occurs, and halts output when a preset number is reached

• Pulse operation (option)
  Pulse frequency: 100 Hz ~ 10 kHz, duty: 20 ~ 80%
  *A pulse-generator must be purchased separately

• Synchronous operation
  Can be connected to other RF power supplies and operated synchronously

• Slow-start / Slow down

• Reflectance limit continuation control
  When the reflected power limiter is triggered, the elapsed time is measured and when the specified amount of time is reached, output is halted

• Past data memory
  When an abnormality occurs, the internal data from the prior 30 seconds is output

• Matching completion confirmation
  When the reflected power is less than the specified value, a confirmation signal is output

• Arcing cut operation confirmation

• Limiter operation confirmation

• Incident/ Reflected power monitor output

• Input power supply confirmation

• RF output confirmation

• Error check signal output

• Various interfaces supported as standard
  DeviceNet, RS232C, analo

• CE mark compliant (excluding some devices)

选项功能

• Manual operation board  (RF-56000)

• Out-of-phase signal generator (Phase Shifter)

• Water-cooled input terminal (for ion plating)

应用案例

产品规格：

*RF-12040由单元1（149mmH/25kg）和单元2（199mmH/30kg）构成。
*外观尺寸不包括突起部分（背面的风扇等）。RF-56000  外观尺寸 ： 105mm(W)×305mm(D)×145mm(H)

RF-120系列高频电源信息由日本电子株式会社(JEOL)为您提供，如您想了解更多关于RF-120系列高频电源报价、型号、参数等信息，欢迎来电或留言咨询。