平台参数 Automated Stage Assembly • High Precision Linear Drive Stage • X and Y Movement • Total travel: 100, 150, or 200 mm • Accuracy: +/-200 nm per axis • Repeatability: +/- 50 nm per axis • Z Movement • Total travel: 25 mm • Accuracy: +/- 200 nm • Repeatability: +/- 75 nm • Theta Movement • Total travel: 360 degrees • Accuracy: +/-5 arc sec • Repeatability: +/-2 arc sec