技术参数: Electron gun / Filament type Thermal Field Emission (ZrO/C) X/Y Tilt/Shift Magnetic Alignment
Cathode life Typically 10,000 hrs+
Beam spot size Down to 8 nm 30 kV, Down to 2nm 50kV
Beam current density Typically > 1000 A/cm2
Acceleration voltage 30 kV or 50kV
Gun EHT unit EHT unit includes Suppressor, Extractor, Lens and Filament supplies
Condenser lenses Integrated E/S Lens in Electron Gun, and Magnetic Condenser Lens
Objective lens One electromagnetic low aberration final probe forming lens
Stigmator T wo Octupole Stigmators, to correct both lens and source astigmatism
Beam blanker Electrostatic blanking plates conjugate to writing plane Bandwidth up to 30 MHz. (tr/tf < 6 ns)
Dynamic focus Iron free coil, ±100 µm range
Beam current drift < ±0.5% / hr with activated beam current feedback system
Beam apertures 4 selectable by aperture changer mechanism
Maximal travel 100 mm Drive unit Brush less 3-phase linear motor Bearing Cross roller bearing Straightness < 5 µm / 50 mm Measuring system Integrated laser scale, resolution < 1nm Position repeatability < ± 6.4 nm Dynamic position error < ± 3.8 nm Speed range high resolution 2.5 - 250 µm/s Speed range low resolution Up to 5 mm/s
主要特点: General: Feedback and closed-loop systems guarantees long time exposure stability. Fast exposure, High beam current from 1 nA to 30 nA, CLV or CAV exposure method, Overlay exposure accuracy and DOSE-control,
Mechanics: Linear motor and stage outside of vacuum chamber No magnetic/electrostatic or acoustics interference Brush less sub systems ensure repeatability Rotation stage on air bearing Radial async. rotation error less than 15 nm ptp