汞探针特点: • Permanent machined orifice plate (no mylar replacement) • Minimal series resistance via innovative Schottky/return dot configuration • Precision vacuum control • Unique vacuum Hg-pull/sample hold-down configuration improves repeatability of the mercury Schottky
2) 米勒剖面浓度分析仪 Miller Profiler - 应用: • Bulk, epitaxial and ion implanted wafers - • Epitaxial and implanted GaAs wafers - • Process control wafers - • Special sharp peak structures
- 测量参数 • Carrier density vs depth data
- 仪器特点 • On-screen real time plot (N vs X) - • Graphical and columnar data representations - • Keyboard selectable BIAS and DEPTH modes - • Menu screen entries for all system parameters - • Integrated calibration routine - • Easy-to-use TRAP detection feature