Normal milling (without cooling) Accelerating voltage 4kV
Cooled milling (holder temperature -120℃) Accelerating voltage 4kV
※ 通常加工(无冷却)时,铁和锌的接合面上能够观察到间隙,而冷却加工时则没有间隙
★ 使用温度控制系统(选配件)冷却 样品:硅晶片接合面
Normal milling Cooling Cooling temperature control (without cooling) (holder temperature -150℃) (holder temperature -20℃) Accelerating voltage 6kV Accelerating voltage 6kV Accelerating voltage 6kV