◆ Scanning range: 100um x 100um x 15um (+/-10%) ◆Scanning type: by sample ◆XY non-linearity: 0.03% ◆Z non-linearity: 0.1% ◆Noise: 0.1nm RMS in XY dimension in 200Hz bandwidth with capacitance sensors on; 0.02nm RMS in XY dimension in 100Hz bandwidth with capacitancel sensors off; l <0.04nm RMS Z capacitance sensor in 1000Hz bandwidth ◆Digital closed loop control: for X,Y,Z axes ◆XY resonance frequency: 7 kHz (unloaded) ◆Z resonance frequency: 15 kHz (unloaded) ◆Active elimination of XY phase lag, overshooting andl ringing results in fast scanning without any dynamic image distortion ◆Digital filtering of Z control signal at scanner resonant frequencies results in extremely short settling time ◆ Motorized sample positioning: range - 5x5mm, positioning resolution - 1um.