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粉末原子层沉积系统 ALD
美国ALD NANOSOLUTIONS公司技术,专注于粉末颗粒表面镀膜。
专用于在粉末、颗粒表面沉积ALD薄膜,可用于科研,生产。单批次体积从45ml~150L,满足科研到生产的需要。可沉积氧化物,氮化物,金属等类型薄膜。可用于锂离子电池、催化剂、等需要粉末镀膜的行业。
专业的粉末镀膜原子层沉积系统,为科研与生产提供专业的解决方案。
设备沉积方法有:流化床法、滚动法、振动法。
粉末原子层沉积系统型号:
FX系列:75 or 150 mL,适用于R&D
FP系列: 500 mL / 2 L / 5 L / 10 L,适用于R&D,生产
RX系列:10 or 40 mL, 适用于R&D
RP系列: ~40L, 适用于生产
CVR系列:15L/hr to 150L/hr,适用于生产
粉末原子层沉积系统技术参数:
ALD REACTOR SYSTEMS
Fluidized Bed Reactors (FBR)
Rotary Reactors (Rotary)
Continuous Vibrating Reactors (CVR)
Substrate Volume
75mL to 10L per batch
10ml to 40L
15L/hr to 150L/hr
Substrate Mass (Density Dependent)
75g - 12.5kg per batch
10g - 50kg per batch
15kg/hr to 150kg/hr
Vapor Draw Sources
2 standard, up to 8
Regulatory Compliance
CE, GMP and ISO compliance upon request
Weight
300 lbs - 1,000 lbs (150kg - 500kg)
300lbs - 4,000lb (150kg - 2000kg)
500lbs - 8,000lb (250kg - 4000kg)
Venting Emissions and Abatement
Equipment can be designed to comply with local jurisdiction codes and regulations
Electrical Requirements
Project-specific and customized. Further details can be supplied upon request
Demonstrated Particle Diameters
10 nm - 500micron
10 nm - 200micron
5-50micron
Potential Particle Diameters
2 nm - 1mm
2 nm - 250px
10nm - 1 cm
Other Features
Highest Precursor Efficiency
Plasma ALD Compatible
Atmospheric Pressure Operation
Reactor Style:
Fluidization Reactor
Substrate Volume:
75 or 150 mL
Reactor Temperatures Range:
25 – 450 °C
Maximum Process Line Temperatures:
200 °C
Vapor Draw Sources:
2 standard, up to 4
Dosing Valves:
Heated Metal Diaphragm
Vacuum Pump:
Rotary Vane (9 CFM or greater)
Regulatory Compliance:
CE Marked
Weight:
300 lbs/ 140 kg
Options Available:
Substrate Loading
Low Vapor Pressure Containers capable of 150 °C
Residual Gas Analyzer
Waste Abatement
Glovebox
Research License for ALD on Particles
Various Vapor Sources
500 mL / 2 L / 5 L / 10 L
400 lbs/ 180 kg
Rotary ALD Reactor – Pilot Series (RP)
Rotary Reactor
~40 L
25 – 200 °C
500 lbs/ 230 kg
Integrated Glovebox
Rotary ALD Reactor – Experimental Series (RX)
10 or 40 mL
Plasma Source from Meaglow
伯英科技粉末与颗粒镀膜原子层沉积系统-Powder ALD-研发与生产型,Powder ALD-
伯英科技粉末与颗粒镀膜原子层沉积系统-Powder ALD-研发与生产型信息由北京伯英科技有限公司为您提供,如您想了解更多关于伯英科技粉末与颗粒镀膜原子层沉积系统-Powder ALD-研发与生产型报价、型号、参数等信息,欢迎来电或留言咨询。
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