ICSPI 便携式原子力显微镜nGauge可用于测定HOPG高序石墨,适用于HOPG高序石墨项目。并且参考多项行业标准D. Strathearn1,2, N. Sarkar1,2, G. Lee1,2 , M. Olfat1,2 , R. R. Mansour1,2 1ICSPI Corp, Waterloo, Canada 2University of Waterloo, Waterloo, Canada 。可应用于纳米材料行业领域。
A single-chip Atomic Force Microscope (sc-AFM) has been developed that integrates X, Y, and Z scanners, sensors, and a sharp tip onto a single 1x1 mm CMOSMEMS device to replace a conventional AFM. This solution leverages physical scaling laws to offer numerous benefits over conventional instruments, including reduced size (1,000x), reduced cost (100x), superior vibration immunity, and improved versatility. In addition, this small, portable system enables new applications for AFM and lowers the barrier to widespread adoption of this popular nanotechnology tool.
nGauge原子力显微镜作为世界上第一台单芯片(Single-Chip)AFM,是加拿大滑铁卢大学(DARPA联合项目)近十年的研发成果。Single-Chip技术通过CMOSMEMS工艺将AFM的所有组件(精细XYZ运动和纳米级感测)集成到单个1mm x 1 mm的芯片上,减少了对大功率及垂直检测激光对准设备的需求,极大提升了设备自身的抗震性能、扫描速率、扫描精度,实现经济、高效、便捷的原子力扫描。