ICSPI 便携式原子力显微镜nGauge参考多项行业标准Neil Sarkar1,2, Geoffrey Lee1,2, Duncan Strathearn1,2, Mahdi Olfat1,2 and Raafat R. Mansour1,2 1University of Waterloo, Waterloo, CANADA 2ICSPI Corp., Waterloo, CANADA。完成Intel IC,DVD的检测。可以用在便携设备行业领域中的Intel IC,DVD项目。
This paper reports the first single-chip scanning probe microscope (sc-SPM) that is capable of simultaneously performing atomic force microscopy (AFM) and scanning thermal microscopy (SThM) without requiring any offchip scanning or sensing components. A thermalpiezoresistive resonant sensor is used to hold the tipsample interaction force constant, while a bolometer-style probe measures local heat transfer effects. The reported instrument obtains local thermal measurements of powered electrothermal MEMS devices and also achieves the first patterning results with a single-chip scanning probe instrument. Importantly, subsurface features on a 22nm CMOS chip are revealed by thermal phase imaging with the present device.
nGauge原子力显微镜作为世界上第一台单芯片(Single-Chip)AFM,是加拿大滑铁卢大学(DARPA联合项目)近十年的研发成果。Single-Chip技术通过CMOSMEMS工艺将AFM的所有组件(精细XYZ运动和纳米级感测)集成到单个1mm x 1 mm的芯片上,减少了对大功率及垂直检测激光对准设备的需求,极大提升了设备自身的抗震性能、扫描速率、扫描精度,实现经济、高效、便捷的原子力扫描。