ICSPIAFM及扫描探针nGauge可用于测定铁电材料,适用于铁电材料项目。并且参考多项行业标准Mostafa Azizi,StudentMember,IEEE, Neil Sarkar,StudentMember,IEEE,and RaafatR. Mansour,Fellow,IEEE。可应用于纳米材料行业领域。
We present the design, fabrication and experimental validation of an integrated Scanning Microwave Microscopy (SMM)/Atomic Force Microscopy (AFM) system that does not require the use of a conventional laser-based AFM. Microfabricated SMM probes are collocated with piezoresistive strain-based sensing AFM probes in a CMOS-MEMS process, and are actuated by integrated electrothermal scanners. Integration of AFM enablesdualmodeimaging(topographyandelectricalproperties) andmoreimportantly,itenablescontrolovertip-sampledistance, whichiscrucialforaccurateSMMimaging.Thisdesignisunique in the sense that the tip can be scanned over the sample in 3 degreesoffreedom,overa scanrange in the x, y, and z directions respectively. We fabricate our device by using a standard foundry CMOS process followed by in-house masklessMEMSpostprocessingtoreleasethedevices.Single-chip SMM/AFMdeviceswithintegrated1-Dand3-Dactuationarethus obtained. These devices can be used to modulate the tip-sample separationtounderlyingsampleswithaperiodicsignal,improving immunitytolong-termsystemdrifts.Wealsoinvestigatetheeffect of tip-sample separation on the resolution of the instrument. To increase measurement sensitivity, a single-stub matching network has been used to match the high tip-to-sample impedance to the 50 ohm characteristic impedance of a performance network analyzer. Measurement results of the CMOS-MEMS SMM are presented to verify the proposed concept.
nGauge原子力显微镜作为世界上第一台单芯片(Single-Chip)AFM,是加拿大滑铁卢大学(DARPA联合项目)近十年的研发成果。Single-Chip技术通过CMOSMEMS工艺将AFM的所有组件(精细XYZ运动和纳米级感测)集成到单个1mm x 1 mm的芯片上,减少了对大功率及垂直检测激光对准设备的需求,极大提升了设备自身的抗震性能、扫描速率、扫描精度,实现经济、高效、便捷的原子力扫描。