俄歇电子能谱仪（在线表面分析）

仪器简介：
The microCMA is a compact (2.75" CF mount) cylindrical mirror type Auger (AES, Auger Electron Spectroscopy) analyzer.
独有的优异性能：
2.75" flange mount CMA with a built in 3kV co-axial electron gun.  The combination of these two features is what makes the microCMA stand out from the competition.
The fact that the microCMA fits on a 2.75" flange means that it can be added to most chambers without needing to add another port to the chamber (most chambers have extra 2.75"ports available).
Being small also means that it is possible to make a complete system using just a T and a small ion pump, rather than a conventional large chamber.
The co-axial electron gun makes it easy to align the sample (elastic peak) and also eliminates the need for an off axis electron gun (electron source, power supply and flange).

技术参数：
Compact 2.75" CF flange mounted

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