-High purity process space up to 2200℃ -Precise defined atmosphere with highest possible purity (6N or better) -Best possible wacuum (final pressure in the field of 10-7 mBar) -UHV serviceable,if necessary -High temperature dynamic,fast heat up and cool down -Hydrogen parity pressure operation on demand -Pressure control between 10-1000 mbar for each peocess gas -Smooth controlled evacuation approriate for powders -Charging racks for the highest temperatures made of metal -TUV proven safety management for flammable and posion gases -Full automatic operation also for highly complex processes -Data recording for quality management