TMC STACIS III主动隔振系统-森泉光电有限公司

TMC STACIS III主动隔振系统

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STACISIII是最先进的主动振动隔离系统。采用先进的惯性振动传感器，复杂的控制算法，和最先进的压电致动器。STACIS通过连续测量地板活动、扩大和收缩压电致动器过滤地板振动来进行实时隔离振动。

最初被设计用于先进半导体工厂的精密显微光刻、计量和检测设备的隔振，STACIS现在是嘈杂环境中敏感仪器的行业标准解决方案，包括但不局限于半导体晶圆厂、失效分析实验室、纳米技术研究、纳米加工设备和材料研究。

STACIS III包括一个新型改进的数字控制器----DC - 2020。它的前后面板上有新型双核处理器，以太网和USB串口，这个新型先进控制系统为用户提供了一个现代的、易于使用的图形用户界面(GUI)。

拥有在世界各地的数百个成功安装案例，STACIS对于大部分振动敏感仪器来说都是最理想的振动消除系统。

Active degrees of freedom	6
Active bandwidth	0.6 Hz - 150 Hz
Passive natural frequency	18 Hz vertical and horizontal
Effective active resonant frequency	0.5 Hz
Isolation at 1 Hz	40% - 70%
Isolation at ≥2 Hz	≥90%
Settling time after a 10 lb (4.5 kg) step input (10:1 reduction)	0.3 sec
Internal noise	<0.1 nm RMS
Operating load range per isolator	Low capacity: 400-1100 lbs (181-499 kg) Med capacity: 900-2100 lbs (408-953 kg) Hi capacity: 1900-4500 lbs (862-2041 kg)
Static lift capacity per isolator	9000 lbs (4090 kg)
Stiffness (1000 lb / 454 kg mass, Med capacity isolator)	40,000 lb/in. (73 x 105 N/m)
Magnetic field emitted at maximum 4 in.(102 mm) from the isolator	<0.02 μG broadband RMS

Environmental and safety	CE and RoHS compliant
Active isolation elements	high-force piezoelectric actuators that receive signal from a high-voltage amplifier with an output of up to 800 VDC
Passive isolation element	single stiff isotropic elastomer (no compressed air supply required)
Vibration sensor elements	downward facing geophone type inertial sensors that measure floor vibration below the isolator and deliver voltage proportional to the velocity of vibration motion
Active feedback control loop	Floor vibration is measured, processed and attenuated below the spring supporting the isolated surface
Isolator dimensions (WxDxH)	11.75 x 12.5 x 10.8 in. 300 x 320 x 275 mm
Isolator weight	75 lb (34 kg)
Operating temperature	50° - 90° F 10° - 32° C
Storage temperature	-40° - 130° F -40° - 55° C
Humidity (operating)	30 - 60%
System power requirements	100, 120, 230, 240 VAC 50/60 Hz AC; <600 W CE compliant
Floor displacement	<480 μin. (12 μm) below 10 Hz
Isolator count per system	minimum of 3
Options	laminated stainless steel platforms, frames, risers, leveling devices, earthquake restraints, lifthoods

Dimensions (WxDxH)	19 x 8.5 x 1.75 in. 483 x 216 x 45 mm
Weight	6.3 lb (2.9 kg)
Processor	150/75 MHz dual core
Sampling rate	10 kHz
Analog outputs	16 channels
Analog inputs	16 channels
Status light	single LED
Front panel ports	1x serial USB 2.0 1x serial Micro-USB 1x Ethernet RJ-45 2x BNC
Rear panel ports	1x serial USB 2.0 1x Ethernet RJ-45 1x RS-232 DB-9 legacy serial for legacy STACIS 2100 isolators
User interface	Front panel LCD display Character menu on HyperTerminal Extended GUI for Microsoft Windows Embedded Ethernet GUI