Excellent in accuracy, stability and functionality, ET4000 is a fully automatic, most appropriate for measurement of micro figure, step height and roughness of FPD, wafers, hard disks, and other nano-order application. ET4000 series can be selected from a number of models according to applications.

ET4000A: Multifunctional and automatic
ET4000L: Fully automatic, compatible with large precision glass or wafer size sample
ET4000M: Reasonable, high performance and general-use

Max. sample size 210 × 210 mm to 300 × 400 mm
Repeatability 1 σ within 0.5 nm
Measuring range Z: 100 μm X: 100 mm (Y stroke: 150 to 400 mm)
Resolution Z: 0.1 nm X: 0.01 μm
Measuring force 0.5 μN to 500 μN

Excellent in accuracy, stability and functionality, ET4000 is a fully automatic, most appropriate for measurement of micro figure, step height and roughness of FPD, wafers, hard disks, and other nano-order application. ET4000 series can be selected from a number of models according to applications.

ET4000A: Multifunctional and automatic
ET4000L: Fully automatic, compatible with large precision glass or wafer size sample
ET4000M: Reasonable, high performance and general-use

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注：该产品未在中华人民共和国食品药品监督管理部门申请医疗器械注册和备案，不可用于临床诊断或治疗等相关用途