Dektak XTL 探针式表面轮廓仪(Stylus Profiler System)

　　Dektak XTL Stylus Profiler System

　　Gage-Capable QA/QC Profiling for Optimal 300mm Performance

　　Dektak XTL Stylus Profiler System

　　Bruker’s new Dektak XTL™ stylus profiler accommodates samples up to 350mm x 350mm, bringing legendary Dektak® repeatability and reproducibility to large-format wafer and panel manufacturing. The Dektak XTL features a small footprint with pneumatic passive isolation and a fully enclosed workstation with a wide, easily accessible interlocking door, making it ideal for today’s demanding production floor environments. Its dual-camera architecture enables enhanced spatial awareness, and its high level of automation maximizes manufacturing throughput. Bruker’s exclusive Vision64® Production Interface with pattern recognition can be scaled to meet your needs and makes data collection an intuitive and repeatable process, minimizing operator-to-operator variability.

　　Though fully optimized for constant production-floor use and maximum throughput in process development and QA/QC applications, the Dektak XTL is also specifically designed to be the industry’s easiest to use stylus profiler.

　　Dektak XTL Delivers

　　„„Bruker-Exclusive Dual Camera Control™

　　–– Navigate to points of interest faster by clicking in live video

　　–– Quickly orient sample to be measured by selecting two points in the live video (Make Horizontal)

　　–– Simplify measurement setup by point-and-click scan start and end positions in live video (Teach) „„Robust Automation Setup and Operation

　　–– Accurately program fiducials and unlimited measurement sites via 300mm, automated encoded XY stage and 360-degree theta

　　––Minimize errors utilizing Vision64 Production Interface with pattern recognition

　　–– Program custom user prompts as well as other meta data into your recipe and store to the database

　　„„Easy Analysis and Data Collection

　　–– Easily automate analysis routines using Quick Analyzer, which supports most frequently used analyses

　　–– Focus your analysis to report only the features needed on complex samples using Step Detection

　　–– Simplify data analysis by giving each measurement site unique name and automatically log to database