诚信认证:
工商注册信息已核实!扫一扫,加入掌上光谱学堂
领域: | 电子/电器/半导体 | ||
样品: | ZrO2薄膜 | 项目: | 膜厚度,光学常数,组成 |
方案文件名 | 下载 |
---|---|
表征玻璃基底上的ZrO2薄膜 |
下载此篇方案 |
The deposition method and conditions used for preparation of the ZrO films have resulted in generation of an inhomogeneous porous layer. Owing to the sensitivity of the UVISEL Spectroscopic Phase Modulated Ellipsometer and software it is possible to detect this layer, and to characterise its composition while at the same time measuring the film thicknesses and optical constants.