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领域: | 电子/电器/半导体 | ||
样品: | ZnO薄膜 | 项目: | Al含量,膜厚度 |
方案文件名 | 下载 |
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椭圆偏振光谱仪的标准应用 |
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The sensitivity of Spectroscopic Ellipsometry is such that characterisation of different doping concentrations of Al in ZnO is possible. Further to this the UVISEL PMSE allows the highest sensitivity and precision of the ellipsometric angles across the full range [0°, 360°], even when ' is close to 0°, and this performance is essential when characterising thin transparent films