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领域: | 电子/电器/半导体 | ||
样品: | 铁电薄膜PbZr1-xTixO3&BA1-xSrxTiO3 | 项目: | 厚度,光学常数,各向异性 |
方案文件名 | 下载 |
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使用椭圆偏振光谱仪表征铁电薄膜PbZr1-xTixO3&BA1-xSrxTiO3 |
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Spectroscopic ellipsometry is a powerful technique to characterize the thickness and optical constants of complex ferroelectric stacks with high accuracy and precision.
Specific modelling features in this study include the characterization of the anisotropic sapphire substrate, rough overlayer and layer inhomogeneity with depth.