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使用MM-16椭圆偏振光谱仪表征TiO2薄膜和多层减反膜
发布时间：
2016-09-21 15:17
来源：
HORIBA科学仪器事业部
| 领域： | 涂料,其他 | ||
| 样品： | TiO2薄膜和多层减反膜 | 项目： | 厚度，光学常数 |
| 方案文件名 | 下载 |
|---|---|
使用MM-16椭圆偏振光谱仪表征TiO2薄膜和多层减反膜 |
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Owing to the sensitivity of the MM-16 Spectroscopic Ellipsometer and the advanced modeling features included in the DP2 software, this note describes the successful characterisation of complicated anti-reflective structures. Accurate and simultaneous determination of thickness and optical properties have been performed in the visible range. Similar analyses have been applied to other high-k material such as Ta2O5 / glass, Al2O3 / 3*{A2O3/a-Si} / GaAs, SiO2 / 2*{HfO2 / SiO2) / glass.
