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TiO2薄膜和多层减反膜的表征
发布时间：
2016-09-21 14:53
来源：
HORIBA科学仪器事业部
| 领域： | 涂料,其他 | ||
| 样品： | TiO2薄膜和多层减反膜 | 项目： | 厚度，光学常数 |
| 方案文件名 | 下载 |
|---|---|
TiO2薄膜和多层减反膜的表征 |
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The characterisation of TiO2 as a single layer and as an 8-layer dielectric stack was successfully carried out with the UVISEL Spectroscopic Phase Modulated Ellipsometer. Accurate and simultaneous determination of thickness and optical properties have been performed in the NIR/Visible range. Similar analyses have been applied to other high-k material such as Ta2O5 / glass, Al2O3 / 3*{A2O3/a-Si} / GaAs, SiO2 / 2*{HfO2 / SiO2) / glass.
