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领域: | 电子/电器/半导体 | ||
样品: | TFT和LTPSTFT-LCD显示器 | 项目: | 厚度,光学常数 |
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TFT和LTPSTFT-LCD显示器的表征 |
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Spectroscopic ellipsometry is an excellent technique for the highly accurate characterization of TFT-LCD display panels based on a-Si and LTPS technologies. Owing to the sensitivity of the UVISEL spectroscopic ellipsometer and the advanced modeling features included in the DeltaPsi2 software it is possible to detect in a multistack different a-Si layers processed by various methods. Moreover the spectroscopic ellipsometry measurements allow determination of the grain size of p-Si films and illustrate the ability to characterize the crystallinity of silicon with high accuracy.