Features Ultra small footprint: 1" x 1.5"Stackable for XY motion......
Features Heavy load capacity - up to 10kgSingle axis motionLong range moti......
Features High speed, direct driveStackable for multi-axis motion30, 50, and 100 ......
Features High speed, direct driveStackable for multi-axis motion30, 65, and 100 ......
Features 1.5nm or 5nm linear displacement measurement25mm total range of m......
Features UHV compatibleTravel range: 10mmSensor resolution: 500nmProprietary Mad......