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单芯片扫描热学显微镜
发布时间：
2018-07-19 15:48
来源：
上海纳腾仪器有限公司
| 领域： | 纳米材料,手持/便携设备 | ||
| 样品： | Intel IC，DVD | 项目： | Intel IC，DVD |
| 参考： | Neil Sarkar1,2, Geoffrey Lee1,2, Duncan Strathearn1,2, Mahdi Olfat1,2 and Raafat R. Mansour1,2 1University of Waterloo, Waterloo, CANADA 2ICSPI Corp., Waterloo, CANADA | ||
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单芯片扫描热学显微镜 |
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This paper reports the first single-chip scanning probe microscope (sc-SPM) that is capable of simultaneously performing atomic force microscopy (AFM) and scanning thermal microscopy (SThM) without requiring any offchip scanning or sensing components. A thermalpiezoresistive resonant sensor is used to hold the tipsample interaction force constant, while a bolometer-style probe measures local heat transfer effects. The reported instrument obtains local thermal measurements of powered electrothermal MEMS devices and also achieves the first patterning results with a single-chip scanning probe instrument. Importantly, subsurface features on a 22nm CMOS chip are revealed by thermal phase imaging with the present device.
