Dektak XTL Stylus Profiler System
Bruker new Dektak XTL stylus profiler accommodates samples up to 350mm x 350mm, bringing legendary Dektak@repeatability and reproducibility to large-format wafer and panel manufacturing. The Dektak XTL features a small footprint with pneumatic passive isolation and a fully enclosed workstation with a wide, easily accessible interlocking door, making it ideal for today’s demanding production floor environments. Its dual-camera architecture enables enhanced spatial awareness, and its high level of automation maximizes manufacturing throughput. Bruker’s exclusive Vision64@ Production Interface with pattern recognition can be scaled to meet your needs and makes data collection an intuitive and repeatable process, minimizing operator-to-operator variability.
Dektak XTL Delivers
Bruker-Exclusive Dual Camera Control™
Navigate to points of interest faster by clicking in live video
Quickly orient sample to be measured by selecting twopoints in the live video (Make Horizontal)
Simplify measurement setup by point-and-click scan startand end positions in live video (Teach)
Robust Automation Setup and Operation
360-degree θ
Easy Analysis and Data Collection
Easily automate analysis routines using Quick Analyzer,which supports most frequently usedanalyses
Focus your analysis to report only the features needed oncomplex samples using Step Detection
Simplify data analysis by giving each measurement siteunique name and automatically log to database
Critical Resultsfor Large-Format Applications
With its unique combination of superiorperformance and ease of use, the Dektak XTLis the new QA/QC and research standardfor industrial thin film deposition monitoringin touch-panel, solar, flatpanel display, andsemiconductor industries.
Wafer Applications:
Step height for deposited thin films(metals, organics)
Step height for resists (soft film materials)
Etching rate determinations
Chemical mechanical polishing(erosion, dishing, bow)
Large Substrate Applications:
Glass Substrate and Display Applications:
AMOLEDs
Step height measurements for LCD R&D
Film thickness measurements for touchpanels
Thin film measurements for solar coatings
Flexible Electronic Films:
Dektak XTL 探针式表面轮廓仪,Dektak XTL
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