If smallest parts or samples have to be moved or positioned with nanometer precision in the millimetre range, nanopositioning systems with piezo inertial drive are used. Very compact actors with appropriate control units are available for rotational and linear movements. The compatibility to each other allows the assembly of multi-axes combinations for complex movements. All the nanopositioning system have a piezo inertialdrive. With a travel in the millimetre range and steos in the nano meter range or with large adjustment range and steps in the μrad range, they are suitable for manifold applications. The basic components of the gonimeter are made of high strength aluminium. Due to a black anodized coating, the surface is protected and reflexion-poor. For the mounting of the nanopositioners, the mounting plate NMP 50is recommend. It is available as a ccessory. In order to operate the nanopositioners,the manual control unit NHS06 has to be used. The complete system is pluggable and ready for connection.
技术参数:
仪器名称,型号/参数
行程
zei小步长
zei大步长
负载 (N)
重复定位精度(双向)
倾斜力矩(Mx,My,Mz)(Nm)
速度
纳米旋转位移台 NDT 24-30
无限旋转角度
40 μrad
100μrad
max.2
max.0.1
max.100mrad/s
纳米旋转位移台 NDT 24-30-MSI
无限旋转角度
40 μrad
100μrad
max.2
40μrad
max.0.1
max.300mrad/s
纳米角度位移台 NAGO P 24-8
±3.3 度
2 μrad
6 μrad
max.2
max.0.1
纳米角度位移台 NAGO T 24-8
±4度
2 μrad
6 μrad
max.2
max.0.1
纳米升降位移台 NHV 24-6
6mm
100nm
300nm
max.3
max.0.1
纳米升降位移台 NHV 24-6-MSI
6mm
50nm
700nm
max.3
400 nm
max.0.1
纳米线性位移台 NLV 24-7
7mm
200nm
300nm
max.2
max.0.1
max.0.3mm/s
纳米线性位移台 NLV 24-7-MSI
7mm
50nm
700nm
max.2
400nm
max.0.1
max.0.7mm/s
纳米线性位移台 PT 30-5
4.8mm
300nm
800nm
max.30
max.0.5
max.0.8mm/s
纳米线性位移台 PT 30-5-MSI
4.8mm
100nm
2000nm
max.30
400nm
max.0.5
max.2mm/s
主要特点:
• high power density on little space • 纳米量级或μrad量级可调 • 停止是无摆动或振荡 • 由高强度的铝制成,黑色阳极氧化 • with ceramic guide for high life time